Paper 144 Abstract

Future of Microelectronics:
Reflections on the Road to Nanotechnology
edited by S. Luryi, J. M. Xu, and A. Zaslavsky
NATO ASI Series E 323, pp. 35-43
Kluwer Academic, Dordrecht (1996)

Active Packaging: a New Fabrication Principle
for High Performance Devices and Systems

Serge Luryi
Department of Electrical Engineering
State University of New York at Stony Brook
Stony Brook, NY 11794-2350


New technology of active packaging (AP) is proposed. It permits the implememtation of device structures that require lithography on opposite sides of a thin semiconductor crystal layer. A major goal of the AP technology is to integrate III-V devices with silicon integrated circuitry on a single substrate; the purpose, however, is not only to "teach the old dog new tricks" but also to greatly expand the assortment of tricks available. The concept is illustrated by describing a process for the fabrication of a collector-up InP heterojunction bipolar transistor, capable of oscillation in the frequency range of 300 to 400 GHz. An attractive application for this technology is the implementation of millimeter and submillimeter phased antenna arrays, in which beam steering is accomplished by amplitude modulation of array elements at a fixed phase difference. Focal plane antenna arrays on a silicon chip should have important applications in automobile collision avoidance and early warning systems, as well as satellite communication systems.

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